Application Areas:
Semiconductor Manufacturing Industry, Chemical and Pharmaceutical Industry

Device Features
1.Ultra-High Purification Accuracy
★ Proprietary catalyst technology with synergistic chemical adsorption, achieving impurity removal to depths of ≤1 ppb.
2.High-Stability Design
★ It utilizes internationally renowned brand components; full-automatic orbital welding by Swagelok, integrated with advanced explosion-proof strategies to ensure safe and stable system operation.
3.Strong Anti-Fluctuation Performance
★ Designed with 120% redundancy per protocol, ensuring stable gaseous index output under fluctuating working conditions.
4.High Accident Resilience
The purification unit features power-off protection functionality.
5.Smart IoT Operation & Maintenance
★ Fully automated operation with remote monitoring
★ Fault early warning and interlocking + operational data traceability system

Technical Parameters