Introduction
This purifier employs the XX process to purify neon, xenon, and krypton gases. The feed gases—argon-neon mixture, xenon, and krypton—enter the purifier and pass through a high-temperature getter reactor, where impurities such as H₂O，O₂，CO，CO₂，CH₄，N₂, and NMHC are removed to levels below 1 ppb. The gas stream then flows through a cooling system to return to ambient temperature before entering a low-temperature getter reactor, where H₂ impurities are removed.

XX Process

Process Flow
High-temperature getter removes CO₂、O₂、N₂、CO、THC、H₂O
Low-temperature getter removes H₂
Once the getter reactors are saturated, they cannot be regenerated and must be replaced as a whole

Application Areas
Semiconductor & Electronic Materials
High-Purity Gas Analysis

Product Features
1.Ultra-High Purification Accuracy
★ Proprietary catalyst technology with synergistic chemical adsorption, achieving impurity removal to depths of ≤1 ppb.
2.High-Stability Design
★ It utilizes internationally renowned brand components; full-automatic orbital welding by Swagelok, integrated with advanced explosion-proof strategies to ensure safe and stable system operation.
3.Strong Anti-Fluctuation Performance
★ Designed with 120% redundancy per protocol, ensuring stable gaseous index output under fluctuating working conditions.
4.High Accident Resilience
The purification unit features power-off protection functionality.
5.Smart IoT Operation & Maintenance
★ Fully automated operation with remote monitoring
★ Fault early warning and interlocking + operational data traceability system

Technical Parameters