Introduction
This purifier adopts the XX process to purify argon and helium gases. Upon entering the purifier, the raw argon and helium gases undergo high-temperature GETTER reactors, where impurities such as H
2O,O
2,CO,CO
2,CH
4,N
2, and NMHC are removed to levels below 1 ppb. The gases then pass through a cooling system to return to ambient temperature before entering low-temperature GETTER reactors for the removal of H
2 impurities.
XX Process
Process Flow
High-temperature getter removals CO
2、O
2、N
2、CO、THC、H
2O
Low-temperature getter removals H
2
Once saturated, the getter reactors cannot be regenerated and must be replaced as a whole.
Application Areas
Semiconductor, LED, Laser, and Solar PV Industries
Optical Fiber Industry
Welding Industry
Integrated Circuit Manufacturing Industry
High-Purity Gas Analysis
Product Features
1.Ultra-High Purification Accuracy
★ Proprietary catalyst technology with synergistic chemical adsorption, achieving impurity removal to depths of ≤1 ppb.
2.High-Stability Design
★ It utilizes internationally renowned brand components; full-automatic orbital welding by Swagelok, integrated with advanced explosion-proof strategies to ensure safe and stable system operation.
3.Strong Anti-Fluctuation Performance
★ Designed with 120% redundancy per protocol, ensuring stable gaseous index output under fluctuating working conditions.
4.High Accident Resilience
The purification unit features power-off protection functionality.
5.Smart IoT Operation & Maintenance
★ Fully automated operation with remote monitoring
★ Fault early warning and interlocking + operational data traceability system
Technical Parameters